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Metal Membrane for Pressure Measurement
Silicon Sensor
Silicon wafer |
Strain gauge |
Sensor |
Insulating layer |
Substrate |
Silicon Sensor for differential pressure
Silicon sensor for differential pressure applications |
Silicon sensor |
Overload membrane |
Metal membrane |
Filling liquid |
From 0.01 psi (1 mbar dP) |
Resistant to changing loads |
Monitoring of functions |
For more information: Endress+Hauser GmbH