| Building | |
 | Cooling cells (5) |
| | Clean room technology (2) |
| | Wall (4) |
| | Doors, windows (2) |
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| | Sewage (5) |
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| Building | |
| | Cooling cells (5) |
| | Clean room technology (2) |
| | Wall (4) |
| | Doors, windows (2) |
| | Floor (3) |
| | Sewage (5) |
| | Workspace equipment (1) |
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